Plasma properties are diagnosed in parallel-plane electrodes under 1-15 kPa within input power of 0-25 W by coupling Optical Emission Spectroscopy (OES) and Planar Laser-induced fluorescence (PLIF). Electron excitation temperature (T-e), electron density (N-e) are obtained based on the intensities and broadenings of atomic and ionic spectral lines of argon. The spatial resolution of T-e and N-e are measured by a high-precision setup based on fiber. At the gas pressure of 1 kPa, T-e reaches maximum of 8.745x10(3) K while the peak of N-e appears in 15 kPa, is 3.237x10(16) cm(-3). Besides, spatial distribution of 1s(5) metastable atoms (Ar-M) with transition scheme 4s(P-2(3/2)0)(2)-4P'(P-2(1/2)0)(1)-4s(P-2(3/2)0)(1) are revealed by PLIF, as a complementary of plasma properties. The number density of Ar-M also shows a larger number density in 15 kPa. Combined with OES, T-e, and number of ArM are higher around the surface of anode within discharge area. The current experimental results are demonstration of optimal plasma state under different external parameters and validation of relevant discharge models.
Wang FY,Zhang SH,Yu XL. Plasma properties measurements of parallel-plane electrodes in Argon by coupling OES and PLIF[C]光谱测量技术及应用大会&第五届燃烧诊断研讨会/GLOBAL INTELLIGENT INDUSTRY CONFERENCE 2020,2020.
; Yu XL(余西龙)
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